Browsing by Author "Xiaojing, Wu"
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A kind of multi-disciplinary simulation and design platform for IC chamber based on commercial solver
Xiaojing, Wu; Jia, Cheng; Linhong, Ji; Yuemin, Hou; Yijia, Lu
2049-2054
Now showing items 1-1 of 1
Xiaojing, Wu; Jia, Cheng; Linhong, Ji; Yuemin, Hou; Yijia, Lu
2049-2054